Microscope Images using FDTD solver

fdtd

#1

Brief description of my work is as follows:

I capture through-focus images of semiconductor wafers using an optical microscope in Reflection mode. The dimension of the pattern on the wafer( SiO2 ) can range from 50 nm to 2 microns. Pattern can be 2D or 3D,
periodic or aperiodic. The intention is to use these images for analysis.

This is currently being done using a “Real” microscope. To obtain the through focus images, I move the piezo stage of the microscope along the Z direction. I use an objective with Numerical Aperture of 0.95 and Illumination Numerical Aperture of 0.3-0.5. LED light source with wavelength ranging from 450 nm to 600 nm is used.

Using FDTD solver, I want to simulate the images of microscope for above settings.

I have not found relevant videos on this kind of application. Can anyone please let me know how this can be achieve in FDTD.?

Thanks,
Madhu


#2

Dear Madhu,

It should be possible to use FDTD for the simulation you want. We have a couple of examples on microscopy in the Knowledge Base. Have you looked at them?