Now I have measured the boron ion distribution and get the relationship between ion distribution and materia implanted depth. Can I import the data into the Device? If can,what is the format of the file contained the ion distribution and depth.Hope to get your feedback.Thanks.
Hi @jbwei, If you can define your distribution profile on a 3D rectangular grid then you can use the import doping object in DEVICE to import the doping profile due to your ion implantation. Please take a look at this post: Import your doping profile from .mat file in DEVICE.
Thanks for your feedback.I will have a try.