Creating radial doping profile for a truncated cone


Continuing the discussion from How to add a constant radial doping profile in DEVICE:

If the structure has variation along z-axis, i.e. if it is like a truncated cone rather than a cylinder then the doping is no longer uniform along z direction and so to create a radial doping profile for such a structure, we need to define the doping at different cross sections along z. We can divide the 3D profile in N number of slices and calculate the doping profile at each slice in a manner similar to what is done in the above mentioned post. The script below assumes that the dopants penetrates the surface of the cone by the same distance (0.5 um) at each slice at different z and calculates the 2D profile of each slice.

radial_doping_truncated_cone.lsf (1.0 KB)

2D profile at three locations,

3D profile after import,

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Radial doping of cone structure
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How to add a constant radial doping profile in DEVICE