complex doping

i want to design this complex doping

There are quite a few examples of scripts to create doping profiles. You should be able to create you doping profile using the same approach. Here’s a link to a few of them:

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Hi @aalam I know those scripts but these scripts for doping in z direction i want for x and y direction

If you look at these scripts, you will notice that the doping data (N) is 3D. This allows you to define any arbitrary doping profile along any axis. The scripts above simply provide some example as you how you can use the script command to create your own ‘N’.